Problem to be solved: to prevent water from liquefied from the superheated steam generator.Solution: the steam introduced from the inlet port P1 is heated to produce superheated steamThe superheated steam generating device 100 which derives the superheated steam from the outlet port P2The outflow port P2 is provided with a flood prevention mechanism 4 for preventing water from being liquefied by water vaporFlood prevention mechanismA temperature sensor 41 provided in the water vapor storage partThe controller 42 has a control unit 42 for controlling the heating of the steam reservoir 2 so that the detected temperature of the temperature sensor 41 is equal to or higher than 100.degree. C.Diagram
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