Procedure for operating a deformable mirror and optical system with a deformable mirror

摘要

The invention concerns a procedure for operating a deformable mirror as well as an optical system with a deformable mirror, the mirror (10, 30) being a mirror substrate (12, 32),a reflective layer system (21, 41) for reflecting electromagnetic radiation occurring on an optical surface (11, 31) of the mirror and having at least one piezoelectric layer (16, 36) arranged between the mirror substrate and the reflecting layer system and over a first one,on the side of the piezoelectric layer facing the reflecting layer system and a second,On the side of the piezoelectric layer facing the mirror substrate, the electrode arrangement can be controlled by a voltage control of the first and/or the second electrode arrangement with an electric field to produce a locally variable deformation.An inventive procedure involves the following steps: determining a temperature distribution in the piezoelectric layer;and adjust the voltage control of the first and/or second electrode array depending on the temperature distribution determined in step (a).