PREPARATION METHOD FOR INTERNAL PORE-FREE SPHERICAL SILICA POWDER FILLER, POWDER FILLER OBTAINED THEREBY, AND APPLICATION THEREOF

摘要

Provided are a preparation method for an internal pore-free spherical silica powder filler, a spherical silica filler obtained thereby, and an application thereof. The method comprises: providing spherical polysiloxane by a hydrolytic condensation reaction of R 1SiX 3, the spherical polysiloxane comprising 80%-100% of a T unit, R 1 being a hydrogen atom or an independently selected organic group comprising 1-18 carbon atoms, X being a hydrolytic decomposable group, and the T unit being R 1SiO 3-; and calcining the spherical polysiloxane under an oxidizing gas atmosphere at a calcining temperature of 850°C-1200°C to obtain the internal pore-free spherical silica powder filler, the pore diameter of the internal pore ranging from 80 nanometers to 1/3 of the diameter of the spherical silica. The spherical silica powder filler is applicable to a high-density chip packaging structure required to be polished in 2.5D, 3D and other packaging processes.