OBSERVATION OF FLOW-INDUCED INSTABILITY OF A NANOMEMBRANE AND ITS USE FOR ON-CHIP FLUID AND AIR FLOW RATE SENSING

摘要

The present invention relates to a device wherein fluid or air-induced instability is converted into a flow sensing mechanism by building a CPW (Coplanar Wave Guide) resonator. Depending on the flow rate, periodic transitions between two bistable states emerge. Owing to the dependence of the transition period and the flow rate, the use of this effect for on-chip flow rate sensing is achieved with this invention. Moreover, the present invention ensures a flow rate sensor to be used in the ventilation machines for the treatment of the COVID-19 pandemic.