SYSTEM AND PROCEDURES FOR THE RECOGNITION OF UNCLUSED WATER CONDITIONS

摘要

A thin layer separation system separates a thin layer on a wafer. A radiation source irradiates the wafer with a stimulating light.An emission sensor detects an emission spectrum of the wafer that reacts to the excitement light.An analysis model based on machine learning analyzes the spectrum and detects the contamination of the thin layer on the basis of the spectrum.