METHOD FOR REMOVING HALOGEN FLUORIDE, QUANTITATIVE ANALYSIS METHOD FOR GAS COMPONENT CONTAINED IN HALOGEN FLUORIDE MIXED GAS, AND QUANTITATIVE ANALYZER

摘要

[Problem] The present invention provides a method for efficiently removing a halogen fluoride including bromine or iodine contained in a mixed gas. Further, the present invention also provides a quantitative analysis method which makes it possible to quantify, efficiently and precisely, impurity components such as oxygen, nitrogen, carbon dioxide and tetrafluoromethane contained in a halogen fluoride.;[Solution] A method for removing a halogen fluoride in a mixed gas by reacting the mixed gas containing a halogen fluoride including bromine or iodine with a removing agent, wherein the removing agent is a chloride, bromide or iodide of potassium, sodium, magnesium, calcium and barium. A quantitative analysis method for a gas component contained in a halogen fluoride mixed gas, characterized by reacting a mixed gas containing a halogen fluoride and another gas component with a removing agent, thereby removing the halogen fluoride in the mixed gas, further removing produced by-products, and quantitatively analyzing a residual gas by a gas chromatograph.