首页> 外国专利> VALVE APPARATUSES AND RELATED METHODS FOR REACTIVE PROCESS GAS ISOLATION AND FACILITATING PURGE DURING ISOLATION

VALVE APPARATUSES AND RELATED METHODS FOR REACTIVE PROCESS GAS ISOLATION AND FACILITATING PURGE DURING ISOLATION

机译:阀门设备和相关方法用于反应过程气体隔离和促进隔离期间吹扫

摘要

An isolation valve assembly including a valve body having an inlet and an outlet. The isolation valve includes a seal plate disposed within an interior cavity of the valve body. The seal plate is movable between a first position allowing gas flow from the inlet to the outlet, and a second position preventing gas flow from the inlet to the outlet. The isolation valve includes a closure element disposed within the valve body. The closure element is configured to retain the seal plate stationary in the first position or the second position. The closure element includes a first sealing element positioned adjacent to a first surface of the seal plate. A working surface of the first sealing element is substantially obscured from the gas flow when the seal plate is stationary.
机译:隔离阀组件包括具有入口和出口的阀体。 隔离阀包括设置在阀体的内腔内的密封板。 密封板可在第一位置之间移动,允许来自入口到出口的气体流动,并且第二位置防止来自入口的气体流向出口。 隔离阀包括设置在阀体内的封闭元件。 封闭元件构造成在第一位置或第二位置保持固定的密封板。 封闭元件包括与密封板的第一表面相邻的第一密封元件。 当密封板静止时,第一密封元件的工作表面基本上从气流遮住气流。

著录项

  • 公开/公告号WO2021211536A1

    专利类型

  • 公开/公告日2021-10-21

    原文格式PDF

  • 申请/专利权人 MKS INSTRUMENTS INC.;

    申请/专利号WO2021US27020

  • 发明设计人 COWE ANDREW B.;HILL GORDON;

    申请日2021-04-13

  • 分类号H01L21/67;H01J37/32;C23C16/50;F16K3/18;F16K51/02;

  • 国家 US

  • 入库时间 2022-08-24 21:51:18

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