PROCESS MONITORING DEVICE, PROCESS MONITORING METHOD, AND PROGRAM

摘要

A process monitoring device includes a data collector, a statistic calculator and a comprehensive statistic calculator. The data collector acquires two or more variables indicating a state of a monitored target. The statistic calculator output each of the statistics that select two from the acquired variables. The comprehensive statistic calculator output a comprehensive statistic indicating a state of the monitored target based on a statistic output by the statistic calculator.