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STRUCTURE FOR DETECTING ELECTROMAGNETIC RADIATION WITH HIGH ABSORPTION EFFICIENCY AND METHOD FOR MANUFACTURING SUCH A STRUCTURE
STRUCTURE FOR DETECTING ELECTROMAGNETIC RADIATION WITH HIGH ABSORPTION EFFICIENCY AND METHOD FOR MANUFACTURING SUCH A STRUCTURE
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机译:用于检测电磁辐射的高吸收效率和制造这种结构的方法
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摘要
An electromagnetic radiation detector structure is adapted to detect electromagnetic radiation in at least one first given range of wavelengths centred around a first wavelength λ0. The detector structure comprises an absorption region of sub-wavelength thickness configured to absorb electromagnetic radiation, the absorption region having a refractive index na, and a Fabry-Perot cavity housing the absorption region. The disclosure further concerns a method to manufacture the detector structure.
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