DC pulse power supply and frequency control method of DC pulse power supply

摘要

A DC pulse power supply device is provided with a voltage clamp section including a capacitor connected in parallel to the DC reactor in order to suppress a rise in surge voltage caused by leakage inductance of a DC reactor of a chopper circuit included in the pulse section. At the start of the pulse operation, which is the initial stage of the pulse mode, the frequency of the pulse operation of the chopper circuit is controlled until the capacitor voltage is charged to a voltage sufficient to reset the magnetic saturation of the DC reactor.