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P-type impurity diffusion composition, manufacturing method thereof, semiconductor element manufacturing method using the same, and solar cell
P-type impurity diffusion composition, manufacturing method thereof, semiconductor element manufacturing method using the same, and solar cell
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机译:p型杂质扩散组合物,其制造方法,使用该制造方法,半导体元件制造方法和太阳能电池
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摘要
Problem to be solved: to provide a p-type impurity diffusion composition capable of uniform diffusion into a semiconductor substrate and a stable storage stability of the coating liquid.At least one resin selected from (a) polyvinyl alcohol and polyethylene oxide(b) solvent andCompounds containing group 13 elementsThe p-type impurity diffusion composition containing the pH of 4 to 6.5, and (b) the solvent contains (B-1) the organic solvent and (b-2) water having a boiling point of 1100.degree. C. or less than 210 A p-type impurity diffusion composition characterized by 10 to 50 mass% in the solvent.No selection
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