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Trench capacitor component with reduced equivalent series resistance and equivalent series inductance
Trench capacitor component with reduced equivalent series resistance and equivalent series inductance
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机译:具有降低的等效串联电阻和等效系列电感的沟槽电容器组件
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摘要
Certain aspects of the present disclosure generally relate to a capacitive element. One example capacitive element generally includes a substrate, a plurality of trench capacitors, an electrically conductive via, a first electrically conductive contact, and a second electrically conductive contact. The trench capacitors intersect the substrate. The electrically conductive via intersects the substrate and is disposed adjacent to at least one of the trench capacitors. The first electrically conductive contact is disposed above the substrate, and the second electrically conductive contact is disposed below the substrate and electrically coupled to the plurality of trench capacitors through the electrically conductive via.
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