Dielectric Filled Nanostructured Silica Substrate for Planar Optical Devices
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机译:用于平面光学装置的介电填充纳米结构二氧化硅衬底
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摘要
Methods and apparatus for creating planar optical structures are disclosed. The method includes etching at least one trench in a substrate, disposing a dielectric material in at least one trench in the substrate, and encapsulating a top of the substrate with a film.
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