GAS SUPPLY AMOUNT MEASUREMENT METHOD AND GAS SUPPLY AMOUNT CONTROL METHOD

摘要

This gas supply amount measurement method is conducted in a gas supply system provided with a vaporization unit, a control valve on the downstream side of the vaporization unit, and a supply pressure sensor that measures a supply pressure between the vaporization unit and the control valve, the method comprising: a step for measuring an initial supply pressure using the supply pressure sensor in a state where the control valve is closed; a step for opening the control valve for a predetermined period of time; a step for measuring, a plurality of times, the supply pressure in a period of time from a time at which a decrease in pressure from the initial supply pressure began to a time at which a predetermined period of time has elapsed during the predetermined period of time in which the control valve is opened; and a step for finding, by calculation based on a plurality of measured values of the supply pressure, a gas supply amount during the predetermined period of time that the control valve was opened.