SYSTEM, METHOD AND COMPUTER PROGRAM PRODUCT FOR COMBINING RAW DATA FROM MULTIPLE METROLOGY TOOLS

摘要

Systems, methods, and computer program products are provided for combining raw data from multiple metrology tools. Reference values are obtained for at least one parameter of the training component. Signals are collected for at least one parameter of the training component using a first metrology tool and a different second metrology tool. Further, at least a portion of the signal is transformed into a signal set, and for each of the at least one parameter of the training component, a correspondence relationship between the signal set and a reference value is determined, from which a corresponding training model is generated. Signals from a target component are collected using at least a first metrology tool and a second metrology tool, and the respectively generated training models are applied to the signals collected from the target component to measure parameter values for the target component.