PROBLEM TO BE SOLVED: To provide an operation method of a gas purification apparatus capable of rapidly increasing the purity of a refined gas obtained immediately after the start of operation. SOLUTION: The purification step is provided with three adsorption towers 12 (adsorption tower 12a, adsorption tower 12b, adsorption tower 12c) and a vacuum pump 22, and the adsorption tower 12 adsorbs and removes impurities from the raw material gas by the PSA method. This is an operation method of the gas purification device 11 for performing gas purification by repeating a regeneration step of removing adsorbed impurities. At the start of operation, a vacuum pump 22 is installed inside the adsorption tower 12 where the purification step is performed next. The vacuum exhaust treatment step of vacuum exhausting and the pressurization treatment step of supplying the raw material gas until the internal pressure reaches the pressure at which impurities are adsorbed are sequentially carried out. [Selection diagram] Fig. 1
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