Real-time traceability method of width of defect based on divide-and-conquer

摘要

In a real-time traceability method of a width of a defect based on divide-and-conquer provided by the present invention, through the calibration transfer function, the multidimensional eigenvector analysis technology based on the electromagnetic field simulation database of defect scattered dark-field imaging and the adaptive threshold segmentation method, the real-time traceability of the width of the defect greater than and close to the diffraction limit of the system is performed, respectively. The extreme random tree regression model is trained by multidimensional eigenvector analysis technology based on the multidimensional eigenvectors in the electromagnetic field simulation database of the defect scattered dark-field imaging. The present invention solves the problems that the width of the defect in defect detection is difficult to be accurately measured in real time, and the conventional image processing algorithm is difficult to accurately identify the width of the defect close to the diffraction limit of the system.