Target for physical vapor deposition and nanocomposite coating film using it and its manufacturing method

摘要

The present invention provides a target for physical vapor deposition, the target being formed of a Zr-Cu-Si based alloy in order to form a low-friction coating film, wherein the target comprises 82-90 at% of Zr, 4-14 at% of Cu, and 4-8 at% of Si.