High-throughput work-in-process buffer system and method

摘要

A buffer system of a semiconductor device manufacturing line tool includes one or more retractable shelves, one or more sliding assemblies that may be positioned over one or more load ports of the semiconductor device manufacturing line tool, and one or more lifting assemblies. The one or more retractable shelves are configured to support the hermetic container. The one or more sliding assemblies are configured to receive the hermetic container and also configured to transport the hermetic container to one or more locations below the one or more retractable shelves. The one or more lifting assemblies are configured to transport the sealed container between any two groups comprising one or more retractable shelves, one or more sliding assemblies and one or more load ports.