SYSTEM FOR AND METHOD OF MONITORING FLOW THROUGH MASS FLOW CONTROLLERS IN REAL TIME

摘要

The mass flow controller includes: a first flow meter constructed and arranged to measure mass flow through the mass flow controller; a second flow meter constructed and arranged to measure mass flow through the mass flow controller; a control valve constructed and arranged to control a mass flow rate through the mass flow controller in response to a control signal generated as a function of the flow rate measured by one of the flow meters; and a system processor/controller configured and arranged to generate a control signal and provide an indication when a difference between the mass flow measured by the first flow meter and the mass flow measured by the second flow meter exceeds a threshold value; do.