STRAIN SENSING FILM, PRESSURE SENSOR AND HYBRID STRAIN SENSING SYSTEM

摘要

Provided are a strain sensing film (5), a pressure sensor and a hybrid strain sensing system. The strain sensing film (5) comprises a semiconductor thin film (201), wherein the semiconductor thin film (201) is provided with at least two resistors (202), and a response of one resistor (202) to strain is different from a response of the at least one other resistor (202) to the strain, thereby enhancing resistance to external environment interference, and improving the accuracy of pressure measurement.