Method and device for determining force fields, force field gradients, material properties or masses with a system of coupled, vibratory, beam-like components

摘要

Method for determining force fields, force field gradients, material properties or masses with a system of coupled, vibratory, beam-like components, in which for the system, which consists of at least two coupled, vibratory, beam-like components, of which at least one of the components has dimensions of at least two spatial directions each greater than or equal to 800 nm and the at least second component has dimensions in at least two spatial directions each less than 800 nm, and their effective masses differ by at least a factor of 3, and of which at least one vibratory, bar-like component with dimensions is fixed in at least two spatial directions greater than or equal to 800 nm and a greater effective mass on at least one side and the at least other vibratory, bar-like component with dimensions in at least two spatial directions each smaller than 800 nm and a lower effective mass is coupled to the vibratory, beam-like component with a greater effective mass, either the resonance frequencies of the individual vibratory, beam-like components coupled to one another have a relative difference in the values of the resonance frequencies of a maximum of 40% or the resonance frequencies of the individual vibratory, beam-like components coupled to one another are determined and then the resonance frequencies of the individual, vibratable, beam-like components are shifted towards one another until a relative difference in the values of the resonance frequencies of a maximum of 40% has been reached and the resonance frequencies have been adjusted, then the system to vibrate is excited at or near one of the matched resonance frequencies of the system of the oscillating, beam-like components coupled to one another, and one of the oscillating, beam-like components ducks with dimensions in at least two spatial directions each smaller than 800 nm and a lower effective mass in the system is exposed to interactions and / or changes that lead to a change in the resonance frequency of the system, which affect an oscillatable, beam-like component with dimensions in at least two spatial directions each greater than or equal to 800 nm and a greater effective mass is measured in the system, and this change in the resonance frequency is used to determine force fields, force field gradients, material properties or masses.