Plasma reactor with high symmetry quadruple gas injection

摘要

To provide a gas supply system that improves ununiformity in a process gas distribution.SOLUTION: In a vacuum chamber 100, an annular lid plate 110 of a plasma reactor has upper and lower groups of gas distribution channels 130, 140 distributing gas along equal length paths from gas supply lines to respective gas injection passages 116, 118 of a gas injection nozzle 114 on a ceiling 104.SELECTED DRAWING: Figure 1A