SiC Fabric SiC fiber heating element structure and rapid heat treatment device using the same

摘要

The present invention is composed of a chamber part containing a SiC fiber heating element including a fabric-type SiC fiber heating element and a ceramic board, and a heat insulating part surrounding the chamber part and a magnetron cover on the upper end of the chamber part. It is characterized in that it consists of a magnetron unit including at least two or more for preventing and a control unit for protecting the control board from microwaves and controlling temperature, air inflow, and air exhaust at the lower end of the chamber unit.