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Method and apparatus for the monolithic encapsulation of a micro-scale inertial navigation sensor suite
Method and apparatus for the monolithic encapsulation of a micro-scale inertial navigation sensor suite
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机译:微尺寸惯性导航传感器套件的单片封装的方法和装置
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摘要
A device preferably for use in an inertial navigation system the device having a single IC wafer; a plurality of sensors bonded to bond regions on said single IC wafer, at least one of said bond regions including an opening therein in gaseous communication with a pressure chamber associated with at least one of the plurality of said sensors; and a plurality of caps encapsulating said plurality of sensors, at least one of said plurality of caps forming at least a portion of said pressure chamber. A method of making the device is also disclosed.
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