The present invention comprises: a scanning electron microscope 15; an observation target ion detection unit 20 which detects an observation target ion; an observation target gas supply unit 19 which supplies an observation target gas to an observation target gas pipe 14 that is connected to a back surface side of a sample 17; a diaphragm-type sample holder 12 on which a sample 17 can be mounted as a diaphragm that partitions an analysis chamber 11 and the observation target gas pipe 14; and a control unit 50. The control unit 50 acquires an SEM image, and also acquires an ESD image of the observation target ion by detecting, via electron excitation and desorption, the observation target gas that diffuses within the sample and flows to the surface in a state in which the observation target gas is supplied and stress is applied to the sample due to the differential pressure between the analysis chamber 11 and the observation target gas pipe 14. The above configuration enables an exploration of the mechanism of a deterioration event such as an embrittlement phenomenon in a structural material caused by the observation target gas.
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