METHOD FOR OPTICAL DISTANCE MEASURING FOR A LASER MACHINING PROCESS, MEASURING SYSTEM FOR OPTICAL DISTANCE MEASURING FOR A LASER MACHINING DEVICE AND LASER MACHINING DEVICE COMPRISING SAME

摘要

The invention relates to a method for optical distance measuring for a laser machining process for machining workpieces (11, 12), said method comprising the following steps: directing an optical measuring beam (43) onto a workpiece surface (1); scanning the workpiece surface (1) with the optical measuring beam (43) along at least one measuring path (3, 3a, 3b, 3c); and determining distances to the workpiece surface (1) at a plurality of measuring points along the measuring path (3, 3a, 3b, 3c), wherein the determining of distances occurs with a first resolution in a first measuring region (31) of the measuring path (3, 3a, 3b, 3c) and with a second resolution in a second measuring region (32) of the measuring path (3, 3a, 3b, 3c), wherein the first resolution is higher than the second resolution.