Particle testing system, sampling strips, projection exposure system and method for testing particle contamination of a surface

摘要

The invention relates to a particle testing system (1) for testing particle contamination of a surface (2), comprising a sampling strip (7) for receiving particles (5) and a sampling device (3). The sampling device (3) has a roller body (9) on which is set up to guide the sampling strip (7) on its outer surface (10). The sampling device (3) is set up to roll the roller body (9) together with the sampling strip (7) on the surface to be tested (2) in order to transfer particles (5) from the surface to be tested (2) onto the sampling strip (7). transferred to. It is provided that the sampling device (3) has a first measuring device (16) and / or a second measuring device (19). The first measuring device (16) is designed to detect a rotational movement of the roller body (9). The second measuring device (19) is designed to detect a contact pressure of the roller body (9) on the surface (2) to be tested.