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Telecentric and broadband achromatic objective lens systems
Telecentric and broadband achromatic objective lens systems
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机译:远心和宽带消色差物镜系统
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摘要
Optical coherence tomography metrology systems with two highly telecentric objective lenses wherein one or both telecentric objectives can be arranged in a pseudo-bistatic configuration. One featured telecentric objective has a large scanning field of view relevant for broadband laser scanning applications where low uncertainty measurements are desired. Another featured telecentric objective has a large image space NA relevant as a standalone microscope objective or as a probing objective for optical coordinate measurement machines.
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