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High-speed crosslinkable neutral underlayer for contact hole self-assembly of polystyrene-b-poly(methyl methacrylate) diblock copolymers and blends thereof

机译:用于聚苯乙烯-B-聚(甲基丙烯酸甲酯)二嵌段共聚物的接触孔自组装的高速可交联中性底层及其共混物

摘要

The present invention relates to a random copolymer comprising repeating units of the following structures (I), (II), (III) and (IV). The present invention also relates to a neutral layer composition consisting of said random copolymer, and also to said crosslinked neutral layer on a substrate which can enable self-assembly of a film of block copolymer overlying said crosslinked neutral layer. to the use of the neutral layer composition, wherein the block copolymer comprises etch-resistant and etchable blocks, wherein the self-assembled pattern is used to create an array of contact holes or posts in the substrate via etching.
机译:本发明涉及一种随机共聚物,其包含以下结构(I),(II),(III)和(IV)的重复单元。 本发明还涉及由所述无规共聚物组成的中性层组合物,以及在基材上的所述交联中性层组成,其能够使覆盖所述交联中性层的嵌段共聚物膜的自组装。 为了使用中性层组合物,其中嵌段共聚物包括耐蚀刻和可蚀刻的块,其中,自组装图案用于通过蚀刻在基板中产生一系列接触孔或柱。

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