Energy dispersive X-ray fluorescence analyzer, evaluation method and evaluation program

摘要

Energy dispersive X-ray X that can easily judge the reliability of the result of quantitative analysis and can promptly recognize that there is an abnormality when there is an abnormality in the measurement conditions, fluorescent X-ray analyzer, sample, sample pretreatment, etc. A line analyzer is provided. An energy dispersive fluorescent X-ray analyzer that acquires a spectrum representing the relationship between the intensity and energy of secondary X-rays based on the secondary X-rays emitted from a sample irradiated with primary X-rays. An acquisition unit, a calculation unit that quantitatively analyzes elements contained in the sample based on a peak contained in the spectrum, a process in which the spectrum acquisition unit acquires the spectrum, and a process in which the calculation unit performs quantitative analysis. It has an evaluation unit that evaluates the reliability of a series of processes.