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Test condition determination device and test condition determination method
Test condition determination device and test condition determination method
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机译:测试条件确定装置和测试条件确定方法
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摘要
The object is to provide a technique for enabling determination of an appropriate test condition. A test condition determining apparatus includes a map generating unit, a withstand voltage estimating unit, and a test condition determining unit. The map generating unit generates a wafer map relevant to a plurality of chips, based on measurement values of thicknesses and carrier concentrations of an epitaxial growth layer, and measurement results of crystal defects in the epitaxial growth layer and a substrate. The withstand voltage estimating unit estimates a withstand voltage of each of the chips based on the wafer map. The test condition determining unit determines a test condition of a test to be conducted on the chips, based on a result of the estimation made by the withstand voltage estimating unit.
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