Force sensor, torque sensor, force sensor, fingertip force sensor, and their manufacturing method

摘要

A force sensor includes a first member, a second member, an intermediate member, a first elastic structure that couples the first member and the intermediate member, a second elastic structure that couples the second member and the intermediate member, and a displacement detector that measures displacements of the first member and the second member. It is possible to provide a force sensor that has high detection precision and that is compact.