Fully automated SEM sampling system for E-beam image enhancement

摘要

Disclosed herein is a method for automatically acquiring training images to train a machine learning model that improves image quality. The method may include analyzing the plurality of patterns of data associated with the layout of the product to identify a plurality of training locations on the sample of the product for use in connection with training the machine learning model. The method includes obtaining, for each of the plurality of training positions, a first image having a first quality, and for each of the plurality of training positions, obtaining a second image having a second quality that is higher than the first quality. may include the step of The method may include using the first image and the second image to train the machine learning model.