BF3/H2 PREPARATION OF HIGH PRESSURE BF3/H2 MIXTURES

摘要

Described herein is a method for filling a gas mixture feed vessel with a constituent gas to obtain a fine composition of a gas mixture comprising two or more constituent gases. Cascading filling techniques can be used that involve flowing gas from a single source vessel to multiple target vessels or from multiple source vessels to a single target vessel. The method may be used to form a dopant gas mixture for ion implantation applications, for example a dopant gas mixture of boron trifluoride and hydrogen.