OHT OHT OHT DRIVING SYSTEM AND ERROR CORRECTION METHOD IN THE OHT DRIVING SYSTEM

摘要

An OHT driving system is disclosed. The OHT traveling system according to an embodiment of the present invention includes a traveling rail provided along the ceiling of a semiconductor manufacturing line; a driving tag repeatedly disposed on the driving rail at regular intervals; an OHT running on the running rail; and an error management unit for checking and improving an error occurring when the OHT is driven on the traveling rail. The error management unit may include: a storage unit in which driving map data of the OHT is stored; a comparison unit for comparing the driving map data stored in the storage unit with data obtained by the OHT actually driving; and a correction unit configured to correct the driving map data according to a result of the comparison unit.