SILICON PRECURSOR COMPOUND, COMPOSITION FOR FORMING SILICON-CONTAINING FILM, COMPRISING SAME, AND METHOD FOR FORMING SILICON-CONTAINING FILM

摘要

The present application relates to a silicon precursor compound, a method for preparing the silicon precursor compound, a precursor composition for forming a silicon-containing film, the precursor composition comprising the silicon precursor compound, and a method for forming a silicon-containing film using the precursor composition.