MULTIFUNCTIONAL C4F7N/CO2 MIXED GAS PREPARATION SYSTEM AND PREPARATION METHOD

摘要

A multifunctional C₄F₇N/CO₂ mixed gas preparation system is disclosed. The C₄F₇N heat exchanger is used to heat and vaporize C₄F₇N input through the C₄F₇N input port; the CO₂ heat exchanger is used to heat and vaporize CO₂ input through the CO₂ input port; the C₄F₇N/CO₂ mixing pipeline structure is used to mix the heated C₄F₇N and heated CO₂, and the C₄F₇N/CO₂ mixed gas output pipeline structure is used to output the C₄F₇N/CO₂ mixed gas. The C₄F₇N/CO₂ mixing pipeline structure comprises a C₄F₇N/CO₂ dynamic gas preparation pipeline structure and a C₄F₇N/CO₂ partial pressure mixing pipeline structure; the C₄F₇N/CO₂ partial pressure mixing pipeline structure includes partial pressure mixing tanks for mixing the CO₂ and the heated C₄F₇N of certain pressures; and a plurality of partial pressure mixing tanks are arranged in parallel. A multifunctional C₄F₇N/CO₂ mixed gas preparation method is also disclosed.