SYSTEMS AND METHODS FOR IMPROVING ACCURACY IN LARGE AREA LASER PROCESSING USING POSITION FEEDFORWARD COMPENSATION

摘要

A laser processing system providing on-the-fly laser processing of a workpiece is disclosed. The laser processing system includes a positioning system configured to support the workpiece, a positioning system controller configured to control movement of the workpiece on the positioning system, a scanner system configured to scan a laser beam over the workpiece, and a scanner controller configured to operate the scanner system and the positioning system controller, the scanner controller receiving vector input data for use in feed-forward position compensation.