A triaxial micromechanical rotational speed sensor equipped with linear drive and rotationally driven sensor device

摘要

The present invention relates to a micromechanical rotational speed sensor device and a corresponding manufacturing method. The micromechanical rotational speed sensor device has a second outer rotational speed to detect a first outer rotational speed about the second axis (y) and a second outer rotational speed about the third axis (x). A first rotational speed sensor device (100) that can be driven to vibrate around one axis (z), with the first, second, and third axes (z, y, x) perpendicular to each other. A second rotation driven by a first rotational speed sensor device (100) and a drive device (AT; AT'; AT ″) arranged to vibrate linearly along the second axis (y). It includes a speed sensor device (200; 201; 202). The second rotation speed sensor device (200; 201; 202) drives the first rotation speed sensor device (100) by the drive device (200; 201; 202). It is coupled to the first rotation speed sensor device (100) via the first coupling device (S1, F5; S2, F6; SA, SB, F12).