Pulse power supply device and waveform adjusting method of the pulsed power supply

摘要

PROBLEM TO BE SOLVED: To realize a current slope close to an allowable upper limit by matching all shared current waveforms to one another while securing safety of a semiconductor switching element of a discharge circuit (while preventing element breakage).;SOLUTION: The pulse power supply device includes a plurality of sets of branch circuits B_k in which one charging circuit J_k and one discharging circuit H_k are combined. A charging circuit is composed of a protective resistance element R_k and a capacitive element C_k connected in series and is connected to a charger E₀. A semiconductor switching element T_k is inserted between positive and negative terminals of each capacitive element and a pair of positive and negative output terminals to an inductive load L₀. Each charging circuit is provided with charge voltage adjustment means (variable protection resistance element R_k) capable of individually adjusting a charge voltage to the capacitive element. Each discharge circuit is provided with inductance adjustment means (variable inductance L_k) capable of individually adjusting inductance of a line.;SELECTED DRAWING: Figure 1;COPYRIGHT: (C)2019,JPO&INPIT