Method for purifying hydrogen or helium and apparatus for purification of hydrogen or helium

摘要

Purification of hydrogen or helium from a raw material gas containing volatile aromatic compounds as impurities and hydrogen or helium as the main component by a PSA method using an adsorption tower (10A to 10C) packed with an adsorbent The method repeatedly performs a cycle including an adsorption step, a pressure reduction step, a desorption step, and a washing step for each of the adsorption columns (10A to 10C). Each adsorption column (10A to 10C) is divided into a first region, a second region, and a third region in order from the upstream side to the downstream side in the flow direction of the source gas in the adsorption column. The first region is filled with a silica gel-based first adsorbent 131 having a filling ratio of 15 to 75 vol% with respect to the entire adsorbent filling volume. The second region is filled with a zeolitic second adsorbent 132 having a filling ratio of 15 to 75 vol%. The third region is filled with an activated carbon-based third adsorbent 133 having a filling ratio of 5 to 30 vol%.