Apparatus for Reviewing and Inspecting Panel for Rapid Inspection

摘要

Disclosed is a board review inspection apparatus capable of rapid inspection. According to one aspect of this embodiment, in the substrate review inspection apparatus for determining whether there is a defect in the substrate, the substrate transfer unit for transferring the substrate in a preset direction and the substrate transfer unit vertically above the preset direction perpendicular to the A plurality of bridges arranged in the direction and connected to each bridge move along the bridges, protruding from each bridge by a predetermined length in the predetermined direction, and moving, a plurality of review units and each review unit for inspecting defects in the substrate, respectively Board review inspection apparatus comprising a plurality of first motors for providing power to move along the bridge and a plurality of second motors for providing power to move each review unit in the predetermined direction from each bridge provides