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METHOD AND DEVICE FOR GENERATING ELECTROMAGNETIC RADIATION BY MEANS OF A LASER-PRODUCED PLASMA
METHOD AND DEVICE FOR GENERATING ELECTROMAGNETIC RADIATION BY MEANS OF A LASER-PRODUCED PLASMA
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机译:通过激光产生的等离子体产生电磁辐射的方法和装置
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摘要
The invention relates to a method for generating electromagnetic radiation by a laser-produced plasma, wherein a target comprising a target material is provided, at least one pulse sequence is directed to said target, wherein the pulse sequence comprises at least three conditioning laser pulses, wherein time intervals between subsequent conditioning laser pulses are 200 ns or less, and a main laser pulse is directed to said target along a first axis, such that a radiation-emitting plasma is formed from at least a part of said target material. The invention further relates to a device (1) for generating electromagnetic radiation by means of a laser-produced plasma comprising a dispensing device (20) and at least one laser source (30), wherein the device is configured such that at least one pulse sequence (32) comprising at least three conditioning laser pulses (33) and a main laser pulse (34) can be generated by the at least one laser source.
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