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MODEL BASED DYNAMIC POSITIONAL CORRECTION FOR DIGITAL LITHOGRAPHY TOOLS
MODEL BASED DYNAMIC POSITIONAL CORRECTION FOR DIGITAL LITHOGRAPHY TOOLS
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机译:基于模型数字光刻工具的动态位置校正
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摘要
The present disclosure generally relates to photolithography systems, and methods for correcting positional errors in photolithography systems. When a photolithography system is first started, the system enters a stabilization period. During the stabilization period, positional readings and data, such as temperature, pressure, and humidity data, are collected as the system prints or exposes a substrate. A model is created based on the collected data and the positional readings. The model is then used to estimate errors in subsequent stabilization periods, and the estimated errors are dynamically corrected during the subsequent stabilization periods.
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