METHOD AND DEVICE FOR GENERATING A PLASMA EXCITED BY MICROWAVE ENERGY IN THE ELECTRON CYCLOTRON RESONANCE (ECR) DOMAIN, IN ORDER TO CARRY OUT A SURFACE TREATMENT OR PRODUCE A COATING AROUND A FILIFORM ELEMENT

摘要

A process and apparatus are disclosed for generating a plasma excited by microwave energy in an electron cyclotron resonance (ECR) region to perform a surface treatment or coating around a filiform element (F). According to the process: - the filamentous elements are moved linearly in succession through magnetic dipoles arranged opposite each other and arranged around the tubes constituting the processing chamber; - Microwave energy is introduced between at least two magnetic dipoles.