Method of utilizing information about the frequency distribution shape of inspection result of pattern inspection equipment

摘要

PROBLEM TO BE SOLVED: To provide a method of dividing data by using all available design information and inspection information such as by the same pattern, by the inspection area, and by the any design size in order to handle a statistic regarding large-scale critical dimension (CD) measurement results.SOLUTION: A pattern inspection method includes: generating an image of an inspection area including a pattern to be inspected; obtaining, from the image, measured values representing two-dimensional shape information of the pattern to be inspected; producing a frequency distribution of the measured values; calculating a statistic of the measured values; calculating a change in the statistic while carrying out an inspection operation which comprises repeating the processes from generating the image to calculating the statistic; and terminating the inspection operation if the change in the statistic is smaller than a threshold value.SELECTED DRAWING: Figure 2