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Microelectromechanical system and control method to control a piezoelectric drive based on an admittance or impedance of the piezoelectric drive
Microelectromechanical system and control method to control a piezoelectric drive based on an admittance or impedance of the piezoelectric drive
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机译：基于压电驱动器的导纳或阻抗控制压电驱动的微机电系统和控制方法
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摘要
A microelectromechanical system includes a piezoelectric drive and a control unit coupled to the piezoelectric drive and designed to control the piezoelectric drive based on a change of the admittance and/or the impedance of the piezoelectric drive.
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