FAIL DENSITY-BASED CLUSTERING FOR YIELD LOSS DETECTION

摘要

A method for failed die clustering is provided that includes extracting (200) a data set of failed die on a wafer from a wafer map for the wafer, determining (201) a density parameter for clustering the failed die, removing (202) false failures from the data set of failed die to generate a reduced data set of failed die, locating (204) clusters of failed die in the reduced data set by executing a density -based spatial clustering of applications with noise (DBSCAN) algorithm with the density parameter, and applying (206) a guard band to each located cluster.