METHOD FOR DETERMINING COMPLEX DIELECTRIC PERMEABILITY AND THICKNESS OF MULTILAYER DIELECTRIC COATINGS IN MICROWAVE RANGE

摘要

FIELD: measuring equipment.;SUBSTANCE: invention relates to measuring equipment, in particular to the determination of the complex dielectric constant and the thickness of multilayer dielectric coatings on the metal surface, and can be used for quality control of multilayer dielectric coatings. Substance: excite in the investigated multilayer coating surface electromagnetic waves of the E-type sequentially at 2N - wavelengths, where N is the number of coating layers. The attenuation coefficient of each surface electromagnetic wave is measured along the normal to the coating surface, including its imaginary part. According to the measurement results, a system of 2N - complex dispersion equations is made up, and the complex permittivities and thicknesses of the coating layers are determined by solving this system of equations;EFFECT: invention improves the accuracy of determining the complex dielectric constant and thickness of multilayer dielectric coatings.;1 cl, 2 dwg